Film thickness gauge Stylus-type step measurement device
Maker KLA Tencor
Model AS-500
Model year
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number XCCP51
Mechanical Specifications
Scan length: 10mm
Scan speed: 2μm/sec~25mm/sec
Input: AC100V 50Hz 4A
Air: 4~7kg/cm2
A device for measuring roughness, waviness, and step height of semiconductor wafers, etc. The instruction manual is slightly missing
Attachments
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