Semi-automatic prober - Apollo Wave AP200
Product Specifications
Maker Apollo Wave
Model AP200
Model year 2023
External Dimensions W1060 D1070 H1550
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number Q20407
Mechanical Specifications
Chiller (AP1263SA), vacuum pump (DAP-6D),
Temperature Controller
Supported wafer size: up to 8 inches
XY axis travel amount: ±50mm
Control resolution: 1um Repeatability: within ±2um
Accuracy: Within ±10um Traveling speed: 30mm/sec (Max)
Z-axis travel: 14mm Resolution: 1um Repeatability: within 2um
Traveling speed: 25mm/sec (Max)
Stage Z-axis movement speed: 25 mm/sec (Max)
θ-axis movement amount: ±6deg Control resolution: 0.001deg
Rotation speed: 1deg/sec (Max)
CCD lens: Photodetector size: 1/1.8
Magnification: 1, 2, 4, 8 times Lighting: LED coaxial incident light (with dimming)
Other accessories: 5Pin+1ES probe card, coaxial cable,
Probe insertion jig set, probe needle (TN-10),
Coaxial probe holder (74CJ-APT-KS/05) x 2,
Temperature controller dimensions: W450 D480 H1120
Chiller dimensions: W600 D1150 H1500
Attachments
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