Wafer surface inspection equipment - Takano WM-7S
Product Specifications
Maker Takano
Model WM-7S
Model year 2023
External Dimensions W860 D900 H1650
Showroom Information
Exhibition hall Enzan Technical Center
Price & Inquiry
price Price Inquiry
Inquiry Number Q20387
Mechanical Specifications
Light source: VioletLD (approx. 405nm)
Detection/scanning method: Spiral scan
Highest detection sensitivity: Bare-Si wafer 0.079 μm
Supported wafer sizes: 50 to 200 mm
Installation stage cassette: 6 inches
OS: Windows 10
Power supply: Single phase AC200-240V 50/60Hz
4-inch stage, cassette included
Attachments
※ Click on the image below to zoom in.
