Cryopumps
Maker ULVAC
Model CRYO-U22H
Model year
External Dimensions W1100 D730 H1010
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number P30100
Mechanical Specifications
Pumping speed: 17000L/S (atN2)
Ultimate vacuum level: 1x10^-7Pa
Band Heater: RBH-22
Power supply: Three-phase AC220V 50/60Hz
Attachments
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