Sputtering Equipment
Maker Afti
Model AFTEX-6000
Model year 1998
External Dimensions W2800 D1400 H1900
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number P20477
Mechanical Specifications
Accessories: Chiller (HRS050-A-20-B) / Vacuum pump (Anest Iwata Scroll x 2)
Coating size: 3 inches
2 ECR sputter sources + 1 magnetron sputter source
Substrate heating: Max 400℃
Power supply: Three-phase AC200V 50/60Hz
Attachments
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