Sputtering Equipment
Maker Canon Anelva
Model E-400S
Model year 2007
External Dimensions W1500 D1700 H2450
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number P20476
Mechanical Specifications
Accessories: Chiller (HRS050-A-20-B) / Vacuum pump (2033SD)
Film size: φ200mm
φ4 type planar magnetron cathode x 4
Substrate heating: Max 800℃
Power supply: Three-phase AC200V 50/60Hz
Attachments
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