Sputtering Equipment
Maker Canon Anelva
Model E-400
Model year 2006
External Dimensions W1450 D1600 H1900
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number P10330
Mechanical Specifications
Film size: Max. φ200mm
Target dimensions: φ101mm
Substrate heating: Max 300℃
DC power supply: 2.5kW RF power supply: 1.2kW
Power supply: Three-phase AC200V 50/60Hz 100A
Attachments
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