Spin Coater
Maker Mikasa
Model MS-B100
Model year 2022
External Dimensions W260 D340 H245
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number OB0259
Mechanical Specifications
Rotary coating type
Accessories: Chuck tables for Φ4in and Φ2in
Accessories: Diaphragm pump (DAP-12S)
Maximum substrate size: φ4 inch wafer or 75×7mm substrate
Vacuum pressure used: -0.08 to -0.1MPa
Rotation speed: 20 to 8,000 rpm
Spin chamber diameter: φ220mm, cup Teflon coated
Power supply: AC100-240V 50/60Hz 5A
Attachments
※ Click on the image below to zoom in.
