Sputtering Equipment
Maker ULVAC
Model SBH-5218R
Model year 2011
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number OA0136
Mechanical Specifications
Sputtering method: Side deposition
Sample size: φ3 inch/φ4 inch/W54 D5 H6mm jig
Cathode: 5 x 18 inch planar magnetron cathode
Target dimensions: 126.8x457x5mm
Configuration: Main unit/Control unit/Cryo pump/Cryo compressor/Mekabu/Rotary pump
Power supply: Three-phase AC200V 50Hz 24.8KVA
Attachments
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