Sputtering Equipment
Maker Anelva
Model E-400S
Model year 2007
External Dimensions W1450 D1700 H2200
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number OA0021
Mechanical Specifications
Maximum deposition area: φ200mm
Substrate heating: Max 300℃
Target: 4 φ4 planar magnetron cathodes
Included rotary pump (adixen 2033SD)
Attached chiller: SMC (HRS024-A-20-BT)
Power supply: Three-phase AC200V 50/60Hz 100A
Attachments
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