Dielectric sputtering equipment
Maker ULVAC
Model MPS-2000C1(BC4735)
Model year 1999
External Dimensions W2811 D1430 H2155
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number O80060
Mechanical Specifications
Cathode: Compatible with φ120mm targets
Board size: φ4 inches
Substrate heating: Max 700℃
Included rotary pump: VD301/D-330DK
TMP: TMP550-L
Power supply: Three-phase AC200V 50/60Hz
Attachments
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