Spin Cleaning Equipment
Maker Shibaura Mechatronics
Model SC300-S
Model year 2018
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number O70378
Mechanical Specifications
Spin processing module external dimensions: W1045 D930 H2200
Cleaning device control panel External dimensions: W570 D805 H2140
Supply unit external dimensions: W1195 D540 H1630
Fire extinguisher unit 1 External dimensions: W400 D300 H1180
Fire extinguisher unit 2 External dimensions: W320 D215 H980
BOX External dimensions: W650 D500 H400
Wafer size: φ300mm Thickness: 30～50㎛
Motor speed: 20 to 1200 rpm
Power supply: 3φ AC200V 75A 50Hz
Attachments
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