Alignment Equipment
Maker Nanotech
Model MA100K
Model year 2006
External Dimensions W1150 D570 H565
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number O70373
Mechanical Specifications
CCD camera (CS3950DiF) x 2
CCD camera controller (CSU4000B) x 2
Vacuum pump (LV660 series)
Stage: W100 D100
Attachments
※ Click on the image below to zoom in.
