Sputtering Equipment
Maker ULVAC
Model BC4279
Model year 1998
External Dimensions W1550 D1500 H2103
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number O70016
Mechanical Specifications
Board size: Max 2 inches
Substrate heating: Max 500℃
Substrate transport: Rotation 360°/Up/Down 30mm
Power supply: Three-phase AC200V 50/60Hz / AC100V 50/60Hz
Attachments
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