Crystal Oscillator Film Deposition Controller

Maker ULVAC

Model CRTM-6000

Model year 2008

External Dimensions W240 D350 H100

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number O61018

Mechanical Specifications

Power supply: 100V 50/60Hz

Film thickness/rate resolution

0.04Å(5MHz crystal)

0.03Å (6MHz crystal)

Film thickness display range/display resolution

0.001~999.9kÅ/1Å

Vapor deposition rate display range/display resolution

0.1~999.9Å/s /0.1Å/s

Supported sensor frequencies

5MHz, 6MHz

Number of sensors that can be installed: 1

Sampling rate 125ms

Number of layers: 99

Number of deposition programs: 30

Digital Input/Output

8ch fixed/12ch programmable

Analog Output

Select one of POWER, RATE, or THK

Attachments

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