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Mass Flow Controller

Maker AERA Japan

Model FC-D980C/CA-98DP

Model year

External Dimensions 130×40×170

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number O60927

Mechanical Specifications

Gas name: CF4

Flow Rate: 20 SCCM

Fitting: VCR1/4

Attachments

※ Click on the image below to zoom in.