Sputtering Equipment
Maker ULVAC
Model SH-450
Model year 1995
External Dimensions W1900D1400H1800
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O60881
Mechanical Specifications
Power supply: 3-phase 200V, 33.2 kvA
Sputtering method: Up target
Dimensions: Φ152.4mm x t6
Number of boards to be mounted: □4”, Φ4”, Φ3”
Sub-holder for circuit board: 5 pieces/batch
Substrate electrode Φ450mm
Water-cooled turntable
RF power supply 13.56MHz
Output 2.0 kW
DC power supply 4kW
MFC (Ar, N2, O2, H2)
Attachments
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