Ion milling equipment

Maker ULVAC

Model IML-580

Model year

External Dimensions W2200 D2000 H1900

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number O60688

Mechanical Specifications

Ion beam density: Max. 1.0mA/cm2

Ion beam energy: 300eV-1.000eV

Packet type Electrode effective diameter: Approx. φ580

Material: Molybdenum

【filament】

For ion source: Tungsten (W)

For neutralizer: Tantalum (Ta)

Acceleration voltage current: 1KVmax 2.68A

Ion species: Argon (Ar)

Electrode effective diameter: Approx. φ580

Board holder: φ100X8 pieces (rotating and revolving holder)

3φ200V ±10% 50/60Hz

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