Sputtering Equipment
Maker ULVAC
Model SIH-450
Model year
External Dimensions W1700 D1750 H1850
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O60687
Mechanical Specifications
Board holder: φ450 2-inch square board x 8
Heating mechanism: Max 250℃ (halogen lamp)
Sputtering chamber: W680 D740 H360
Outlet: W920 D740 H260
Substrate heating: 3Kw
RF power supply: 1Kw + 3Kw
3φ200V 50Hz
Attachments
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