Sputtering Equipment
Maker ULVAC
Model SH-550ーC12
Model year 2000
External Dimensions W1950 D1300 H1800
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O60686
Mechanical Specifications
Cathode size: Φ8in
Board holder: Φ550
Rotational deposition possible
Attachments

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