Exposure equipment (mask aligner)
Maker Canon
Model MPA-500FAb
Model year
External Dimensions W1500 D1600 H2000
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O60633
Mechanical Specifications
Photomask: 100mm (4"), 125mm (5"), 150mm (6")
Wafer size: 3" 4" 5"
Alignment Scope
Objective 10X, Eyepiece 10X, 15X, Variable Magnification 1X, 2X, 3X, Low Magnification 0.3X
Field of view: 30mm to 100mm
3φ 200V 50/60Hz 5600VA
Attachments
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