Cryopumps
Maker ULVAC
Model CRYO-U6H
Model year
External Dimensions Φ235 H520
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O60613
Mechanical Specifications
Reached temperature: 15K or less
Exhaust speed: (N2) 750L/S
Flange diameter: VG150
Cooling down time: 80/70min(50/60HZ)
Accessories: None
Attachments
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