Load-lock type sputtering equipment
Maker ULVAC
Model ISP-4000-HC
Model year
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number O60273
Mechanical Specifications
Three-way simultaneous deposition possible (up-sputtering)
Target size 50.8mm
Sputtering power supply (RF power supply, DC power supply)
Usable board size: Maximum φ100mm
Substrate heating: Maximum 800℃
Oil rotary vacuum pump x 2 units
Power supply: Three-phase AC200V
Attachments
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