CVD equipment
Maker Applied Materials
Model AKT-1600
Model year
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number O51372
Mechanical Specifications
Board size: 300x300mm (can be changed to 370x470)
Chamber configuration: Load lock chamber (13 levels) / reaction chamber / heat chamber (13 levels) / transfer chamber / substrate cassette station
Attachments

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