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CVD equipment

Maker Applied Materials

Model AKT-1600

Model year

External Dimensions

Exhibition hall Enzan Technical Center

price Price on request

Inquiry Number O51372

Mechanical Specifications

Board size: 300x300mm (can be changed to 370x470)

Chamber configuration: Load lock chamber (13 levels) / reaction chamber / heat chamber (13 levels) / transfer chamber / substrate cassette station

Attachments

※ Click on the image below to zoom in.