Lamp Annealing Equipment
Maker Koyo Thermo (JTEKT Thermo)
Model RLA-1208-N
Model year
External Dimensions W1600D1500H2100
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O51225
Mechanical Specifications
Wafer size: φ100 to 200 mm
Normal operating temperature: 400-1200℃
Processing number: Single sheet
Wafer handling: Manual
Heating rate: Max. 200℃/sec
Power supply: 3 phase 200V/1 phase 100V 60Hz 67.2Kw
Gas used: N2/O2/N2O/3%H2/N2
*No specifications
Attachments
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