Auto Spin Coater
Maker Able (Micro Engineering)
Model NSC-220H
Model year
External Dimensions WW1400D1400H1700
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O51224
Mechanical Specifications
Compatible workpiece: 3 inches
【composition】
- 2 HMDS coating units
・1 hot plate
・1 cooling plate
Cup diameter: φ220mm
Sample stage: φ30mm
Rotation range: 30 to 5000 rpm
Chemical nozzle: Swing nozzle
Chemical system: 5 systems (2 resists, 1 rinse, 2 HMDS)
Hot plate: 150x150xt20
Power supply: 3-phase 200V 30KVA
Separate exhaust equipment required (5 systems)
Chemical cabinet size: W1750D300H1000
Caster is heavy
Attachments
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