Dry Etching Equipment
Maker Showa Vacuum
Model SPE-2010
Model year 2015
External Dimensions （本体）W1000 D1100 H1600
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O51173
Mechanical Specifications
Power supply: φ3 200V 16.7KVA 60Hz
Cooling water: 0.2Mpa 0.96m3/h
Air pressure: 0.5Mpa
RF power: 13.56MHz (Max500W)
MP: VG203VA / Osaka Vacuum (2.7x10-3Pa or less)
Board size: φ3 inch (orientation flat)
Gases used: He, O2, CHF3
Etching method: Reactive etching
Attachments
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