Steaming device
Maker ULVAC
Model EBX-8C
Model year 不明
External Dimensions W1200D770 H1660
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O51170
Mechanical Specifications
3 phase: 200V 50A/60Hz
Hearth 4-hole type
Holder size: Φ280mm
Processing of 15 boards (1Φ55mm x 15 pieces)
Substrate size 2Φ100mm x 4 pieces
Substrate size 3Φ125mm x 3 pieces
EB power supply HP-1010F
Cryo Compressor C2W303
Attachments
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