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Plasma Equipment

Maker Mori Engineering

Model PB-600

Model year 1999.10

External Dimensions W850D900H1650

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number O51164

Mechanical Specifications

Quartz chamber dimensions: φ200xL300mm

High frequency oscillator (SFA-600): Output 600w

Vacuum Pump: Alcatel 2021

Power supply: 3 phase 200V/1 phase 100V 50/60Hz

Attachments

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