Scrub Cleaning Equipment
Maker Kanamex
Model KC-S150NV2
Model year
External Dimensions W850D1350H1900
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O51152
Mechanical Specifications
Wafer size: φ2/φ4
Thickness: 200-500μm
Cup diameter: 350mm
AC servo motor: 400w
Rotation speed: 0 to 2000 rpm
Connection diameter: Pure water 16A, N2/air 3/8, drain 25A, exhaust 100A
Power supply: 3-phase 220V 60Hz 20A
Attachments
※ Click on the image below to zoom in.
