Stylus-type step thickness gauge
Maker KLA Tencor
Model AS-500 (Alpha-Step 500)
Model year
External Dimensions W670D1000H1400
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O51151
Mechanical Specifications
Scan range: 10mm
Scan speed: 2 to 200 μm/s
Camera: 70-210x
Stylus range: 1 to 99.9 mg
Sample size (Max): 158x158mm
Stage rotation: 180°
Power supply: 1 phase 100V 50/60Hz
Front door hinge broken
Attachments
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