Plasma cleaner
Maker Yamato Science
Model PDC210
Model year
External Dimensions W800 D660 H1350
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number O51100
Mechanical Specifications
Plasma mode RIE (DP mode option)
Electrode structure Parallel plate (fixed between electrodes)
High frequency output: MAX.500W
Oscillation frequency: 13.56MHz crystal oscillation
Stage dimensions: W250×D170mm
Chamber material: Aluminum
Reactive gas: Argon
Input: AC200V3φ 50/60Hz
Internal dimensions: W400 D250 H150
Vacuum pump: PASCAL2021SD
Attachments
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