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Cryopump Compressor

Maker ULVAC

Model C30MV

Model year

External Dimensions W450 D620 H680

Exhibition hall Enzan Technical Center

price Price on request

Inquiry Number O50144

Mechanical Specifications

Power supply: 3-phase AC200V

Refrigeration motor 5.0/6.0kW

He pressure 1.20Mpa

Attachments

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