Steaming device
Maker Showa Vacuum
Model SEC-22C
Model year 2017
External Dimensions
Exhibition hall Enzan Technical Center
price Price on request
Inquiry Number O50035
Mechanical Specifications
Vacuum chamber dimensions: 800x800x1350mm
Evaporation by electron gun
Substrate heating: Max 300℃/normal 160℃
Jig rotation speed (approx.): 6/15/30 rpm
Cryocompressor operating hours: 30835.8/32651.8/32653.1Hr
Attachments
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