Cryopumps
Maker ULVAC
Model CRYO-U12HL
Model year
External Dimensions W750 D550 H500
Exhibition hall Tsuru Technical Center
price Price on request
Inquiry Number O30763
Mechanical Specifications
Flange outer diameter φ400mm
Exhaust speed (20℃) Ar_3,300L/s
Ultimate pressure 10-7(10-9)Pa(Torr)
Maximum flow rate: Ar_2.0×103(15)Pa・L/s(Torr・L/s)
Pumping capacity Ar_2.1×103 (2.3×106) Pa・L (Torr・L)
Cooling down time 90/80min(50/60Hz)
Cryometer (MBS-2)
Regulator (R20)
on castersangletable
Attachments
※ Click on the image below to zoom in.
