Cryopumps
Maker ULVAC
Model CRYO-U12HSP
Model year
External Dimensions W520 D550 H700
Exhibition hall Tsuru Technical Center
price Price on request
Inquiry Number O30661
Mechanical Specifications
Exhaust speed: 4100L/S
Flange outer diameter φ400mm
Exhaust speed (20℃) Ar_3,300L/s
Ultimate pressure 10-7(10-9)Pa(Torr)
Maximum flow rate: Ar_2.0×103(15)Pa・L/s(Torr・L/s)
Pumping capacity Ar_2.1×108 (1.6×106) Pa・L (Torr・L)
Cooling down time 85/75min(50/60Hz)
Cryometer (MBS-C2)
Regulator (R20)
Attachments
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