Sputtering Equipment
Maker Anelva
Model SPC-540H
Model year 1984
External Dimensions (本体)W1650 D1350 H2180
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1184
Machine specifications Power supply: 200V 75A 60Hz
Cooling water: 3kgf/cm2 22L
Air pressure: 5kgf/cm2
RF power supply: PRF-503 2 units → 1 unit with switch (Anelva)
DC power supply: PDC087B (Anelva)
MP: CAP-121 (Anelva)
Target size: Approximately 130mm x 380mm
Number of targets: 4
Gas used: Ar, O2
Film formation method: Sputter SIDE
Attachments
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