Sputtering Equipment
Maker Anelva
Model SPF-530H
Model year 1988
External Dimensions (本体)W1500 D1100 H1750
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1182
Mechanical Specifications
Power supply: 200V 60A 50/60Hz
Cooling water: 2kgf/cm2 10l
Air pressure: 7kgf/cm2
RF power supply: PRF-503 (Anelva)
MP: CAP-80 Mark II (Anelva)
Target size: φ6 inches (150 mm)
Number of targets: 3, 3 backing plates included (attached to the main unit)
Gas used: Ar
Film formation method: Sputter UP
Attachments
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