Dry Etching Equipment
Maker ULVAC
Model NLD-5700
Model year 2015
External Dimensions W1200 D2480 H2120
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1160
Mechanical Specifications
3 phase: 200V 27.6KVA 50/60Hz
Substrate size: 4-inch wafer (orientation flat)
accessories
・Chiller HRZ004-L-X002
・2 dry pumps HR60
Attachments
※ Click on the image below to zoom in.
