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Sputtering Equipment

Maker ULVAC

Model SIV-200

Model year 2017

External Dimensions W3500 D1500 H2000

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number NC1159

Mechanical Specifications

3 phase: 200V 28KVA 50Hz

Standard size 4 inch wafer (orientation flat)

accessories

・Cryocompressor C30MVR

・Rotary pump VD60C

Attachments

※ Click on the image below to zoom in.