Sputtering Equipment
Maker ULVAC
Model SIV-200
Model year 2017
External Dimensions W3500 D1500 H2000
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1159
Mechanical Specifications
3 phase: 200V 28KVA 50Hz
Standard size 4 inch wafer (orientation flat)
accessories
・Cryocompressor C30MVR
・Rotary pump VD60C
Attachments

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