LP-CVD device
Maker Koyo Thermo Systems
Model 272A-M200
Model year 2009
External Dimensions W12060 D3250 H1800
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1157
Mechanical Specifications
3 phase: 200V 36.25kVA 60Hz
Work size: Φ50mm, Φ76.2mm, Φ100mm
Processing capacity: 25 sheets/batch
Top: Annealing at Joyo temperature - 1100 degrees
Bottom: Poly-Si room temperature 600-700 degrees
*PLC data loss
Attachments
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