Sputtering Equipment
Maker Anelva
Model SPC-540H
Model year 1984
External Dimensions 1500×1050×2210
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1156
Mechanical Specifications
Target size: Approx. 110mm x 280mm
Sputtering power supply: RF power supply (200V 3Φ 40A 5kW) 4/9 - (W570D750H1590) 5/9, 6/9, 7/9 - (W570D730H1305)
Control panel: 2/9-(W575D910H2300) 3/9-W570D770H1815
Cryopump: ALCATEL-2063-SD (W255D815H415)
Cryocompressor: SUMITOMO-CKW21 (W480D550H465)
Attachments
※ Click on the image below to zoom in.
