Mask aligner (exposure machine)
Maker Union Optics
Model PEM-800
Model year 2001
External Dimensions W750 D850 H1670
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1113
Mechanical Specifications
Power supply voltage: 100V, 11.5A, 50/60Hz
Eyepiece: NWF10X
Mask size: up to 5 inches
Wafer size: up to 4 inches
Gas used: N2
Operating pressure: 0.4 to 0.5 MPa
Vacuum: 21.3KPa (-80KPa)
Vacuum pump (DA-60S) included
Booth with FFU included (W1100 D1000 H1900)
* Simple manual included
Attachments
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