Ashing device
Maker Tokyo Ohka Kogyo
Model TCA-3811
Model year 2008
External Dimensions W900 D1850 H2050
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1077
Mechanical Specifications
3 phase: 200V 50A/60Hz
Board size: 75mm
RF power: 1000W 13.56MHz
<Exhaust set>
・Rotary pump ALCATEL2063
・Mechanical booster pump ANELVA B301
・Diaphragm ULVAC DA-20D
Attachments
※ Click on the image below to zoom in.
