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Ashing device

Maker Tokyo Ohka Kogyo

Model TCA-3811

Model year 2005

External Dimensions W900 D1850 H2050

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number NC1076

Mechanical Specifications

3 phase: 200V 50A/60Hz

Board size: 75mm

RF power: 1000W 13.56MHz

<Exhaust set>

・Rotary pump ALCATEL2063

・Mechanical booster pump Kashiyama KMB301

Attachments

※ Click on the image below to zoom in.