Etching Equipment
Maker ULVAC
Model NE-701
Model year 2000
External Dimensions W1300 D2400 H2000
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1075
Mechanical Specifications
3 phase: 200V 19.9kVA 50/60Hz
Board size: 150mm
(Process gas)
O2, Ar, Cl2, BCl3, 100sccm each
P-N2, cooling: He
(accessories)
・Dry pump HR80
・Rotary pump D-650DK
・Chiller NCC-1410
Attachments
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