Etching Equipment
Maker ULVAC
Model NE-701
Model year 2007
External Dimensions W1300 D2400 H2000
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC1074
Mechanical Specifications
3 phase: 200V 19.9kVA 50/60Hz
Board size: Φ6 inches
Process gas: O2, Ar, Cl2, BCl3, 100sccm each
P-N2, cooling: He
Power supply: ANTRNNA: RF1000W, BIAS: RF300W
Batch/Single-wafer: Batch type
Board holding method: ESC chuck
【accessories】
・Dry pump HR60
・Rotary pump D-650DK
・Chiller CA-1112
Attachments
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