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Cryopumps

Maker ULVAC

Model CRYO-U6H

Model year

External Dimensions Φ235 H520

Exhibition hall Kyushu Technical Center

price Price on request

Inquiry Number NC0984

Mechanical Specifications

Intake flange: VG150 (outer diameter: 235 mm)

Ultimate pressure: 10-7Pa

Compatible compressors: C10/C10AT/C10ES

Attachments

※ Click on the image below to zoom in.