Cryopumps
Maker ULVAC
Model CRYO-U6H
Model year
External Dimensions Φ235 H520
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC0984
Mechanical Specifications
Intake flange: VG150 (outer diameter: 235 mm)
Ultimate pressure: 10-7Pa
Compatible compressors: C10/C10AT/C10ES
Attachments

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