Etched device
Maker Albuck
Model CE-L
Model year 2013
External Dimensions W800 D2550 H1400
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number NC0854
model ce-l
year 2013
-> Machine specification 6 inch tray (within 140mm corresponding board)/5 sheets
Process room W750 D500 H150m RIE Plasma method
Cathode coupling type, electrode direct placement type
RF Power Source: 300W 3φ 200V 50/60Hz Used Gas: AR, O2, SF6
Attachment
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