Cryopumps
Maker ULVAC
Model CRYO-U10PU
Model year
External Dimensions W450 D400 H540
Exhibition hall Kyushu Technical Center
price Price on request
Inquiry Number N80335
Mechanical Specifications
*Temporary assembly description included
Intake flange: VG250
Pumping speed: N2 2300L/S
Ultimate pressure: 10-7Pa
Refrigeration unit: R10
Compressor unit: C15R
Attachments
※ Click on the image below to zoom in.
